Title : Chemically Stable Atomic-Layer-Deposited Al2O3 Films for Processability.

Pub. Date : 2017 Jul 31

PMID : 31457661






1 Functional Relationships(s)
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1 On the contrary, heat-treated, crystalline ALD Al2O3 has shown resistance to deterioration in solutions, such as standard clean (SC) 1 and 2. Aluminum Oxide transcription factor 19 Homo sapiens