Title : AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H2S Gas Sensing.

Pub. Date : 2021 Dec 13

PMID : 34947725






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1 The properties of H2S gas sensing were investigated using a ZnO nanostructure prepared with AZO (zinc oxide with aluminium) and Al surfaces which were developed on a MEMS (Micro Electromechanical System) device. Zinc Oxide gastrin Homo sapiens
2 To find the optimal conditions for H2S gas sensing, different ZnO growth times and different temperatures were considered and tested, and the results were analysed. Zinc Oxide gastrin Homo sapiens
3 At 250 C and 90 min growth time, a ZnO sensor prepared with AZO and 40 nm Al recorded an 8.5% H2S gas-sensing response at a 200 ppb gas concentration and a 14% sensing response at a gas concentration of 1000 ppb. Zinc Oxide gastrin Homo sapiens
4 At 250 C and 90 min growth time, a ZnO sensor prepared with AZO and 40 nm Al recorded an 8.5% H2S gas-sensing response at a 200 ppb gas concentration and a 14% sensing response at a gas concentration of 1000 ppb. Zinc Oxide gastrin Homo sapiens
5 At 250 C and 90 min growth time, a ZnO sensor prepared with AZO and 40 nm Al recorded an 8.5% H2S gas-sensing response at a 200 ppb gas concentration and a 14% sensing response at a gas concentration of 1000 ppb. Zinc Oxide gastrin Homo sapiens