Title : Galvanic corrosion inhibition from aspect of bonding orbital theory in Cu/Ru barrier CMP.

Pub. Date : 2021 Oct 27

PMID : 34707193






1 Functional Relationships(s)
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1 The sp2 carbon atoms adjacent to nitrogen in the pyridine ring provide pi-acceptor which forms a complex with filled d-orbital of native oxides on Cu and Ru metal film. pyridine Sp2 transcription factor Homo sapiens