Title : The effect of hydrophilic photoacid generator on acid diffusion in chemical amplification resists.

Pub. Date : 2014 Dec

PMID : 25971116






1 Functional Relationships(s)
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1 The synthesized polymers were confirmed by NMR and FT-IR, and their thermal properties were studied using TGA and DSC. Polymers desmocollin 3 Homo sapiens