PMID-sentid Pub_year Sent_text comp_official_name comp_offsetprotein_name organism prot_offset 26373117-1 2015 This paper reports the etch rates and etched surface morphology of semipolar GaN using a potassium hydroxide (KOH) solution. potassium hydroxide 89-108 gigaxonin Homo sapiens 77-80 26373117-1 2015 This paper reports the etch rates and etched surface morphology of semipolar GaN using a potassium hydroxide (KOH) solution. potassium hydroxide 110-113 gigaxonin Homo sapiens 77-80 26373117-2 2015 Semipolar (11-22) GaN could be etched easily using a KOH solution and the etch rate was higher than that of Ga-polar c-plane GaN (0001). potassium hydroxide 53-56 gigaxonin Homo sapiens 18-21 26373117-3 2015 The etch rate was anisotropic and the highest etch rate was measured to be approximately 116 nm/min for the (1011) plane and 62 nm/min for the (11-20) plane GaN using a 4 M KOH solution at 100 C, resulting in specific surface features, such as inclined trigonal cells. potassium hydroxide 173-176 gigaxonin Homo sapiens 157-160 22409032-2 2011 Patterned GaN with 2 microm-wide sink-like strips was achieved by using 500 keV Au+ ion implantation and KOH etching. potassium hydroxide 105-108 gigaxonin Homo sapiens 10-13