PMID-sentid	Pub_year	Sent_text		comp_official_name	comp_offsetprotein_name	organism	prot_offset
24104251-0	2013	Silicon nitride based plasmonic components for CMOS back-end-of-line integration.	silicon nitride	0-15	MOS proto-oncogene, serine/threonine kinase	Homo sapiens	47-51