Title : Laser crystallized low-loss polycrystalline silicon waveguides.

Pub. Date : 2019 Feb 18

PMID : 30876064






1 Functional Relationships(s)
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1 The process involves pre-patterning amorphous silicon films to confine the thermal energy during the crystallization phase, which helps to control the grain growth and reduce the heat transfer to the surrounding media, making it compatible with CMOS integration. Silicon MOS proto-oncogene, serine/threonine kinase Homo sapiens