Title : Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency.

Pub. Date : 2012 Dec 10

PMID : 23262857






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1 A highly efficient grating structure for the coupling between standard optical fibers and single-mode waveguides in the silicon-on-insulator platform realized in a CMOS fabrication process is presented. Silicon MOS proto-oncogene, serine/threonine kinase Homo sapiens