Title : On-chip deposition of carbon nanotubes using CMOS microhotplates.

Pub. Date : 2008 Jan 16

PMID : 21817549






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1 On-chip deposition of carbon nanotubes using CMOS microhotplates. Carbon MOS proto-oncogene, serine/threonine kinase Homo sapiens
2 The direct deposition of carbon nanotubes on CMOS microhotplates is demonstrated in this paper. Carbon MOS proto-oncogene, serine/threonine kinase Homo sapiens
3 Tungsten microhotplates, fabricated on thin SOI membranes aside CMOS control circuitry, are used to locally grow carbon nanotubes by chemical vapour deposition. Tungsten MOS proto-oncogene, serine/threonine kinase Homo sapiens
4 Tungsten microhotplates, fabricated on thin SOI membranes aside CMOS control circuitry, are used to locally grow carbon nanotubes by chemical vapour deposition. Carbon MOS proto-oncogene, serine/threonine kinase Homo sapiens
5 This allows carbon nanotubes to be grown alongside CMOS circuitry on the same wafer without any external heating, thus enabling new applications (e.g. smart gas sensing) where the integration of CMOS and carbon nanotubes is required. Carbon MOS proto-oncogene, serine/threonine kinase Homo sapiens