Title : Bias-Enhanced Formation of Metastable and Multiphase Boron Nitride Coating in Microwave Plasma Chemical Vapor Deposition.

Pub. Date : 2021 Nov 25

PMID : 34885322






1 Functional Relationships(s)
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1 The applied negative DC bias was found to yield a higher content of sp3 bonded BN in both cubic and metastable wurtzite structural forms. wurtzite Sp3 transcription factor Homo sapiens