Title : Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths.

Pub. Date : 2021 Nov 17

PMID : 34789732






1 Functional Relationships(s)
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1 SiN layer was deposited on a standard silicon wafer with a Low-Pressure Chemical Vapor Deposition furnace. Silicon embryonal Fyn-associated substrate Homo sapiens