Title : Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures.

Pub. Date : 2018 Sep 28

PMID : 30266948






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1 Graphene transistors with fluorinated graphene contacts show a room temperature mobility of 40,000 cm2 V-1 s-1 at carrier density of 4 x 1012 cm-2 and contact resistivity of 80 Omega mum. Graphite latexin Homo sapiens
2 Graphene transistors with fluorinated graphene contacts show a room temperature mobility of 40,000 cm2 V-1 s-1 at carrier density of 4 x 1012 cm-2 and contact resistivity of 80 Omega mum. Graphite latexin Homo sapiens