Title : Design and characterization of a fully differential MEMS accelerometer fabricated using MetalMUMPs technology.

Pub. Date : 2013 May 2

PMID : 23645109






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1 In device characterization, surface profile of the fabricated device is measured using a Veeco surface profilometer; and mean and gradient residual stress in the nickel structure are calculated as approximately 94.7 MPa and -5.27 MPa/mum, respectively. Nickel latexin Homo sapiens