Title : Transfer of micro-optical structures into GaAs by use of inductively coupled plasma dry etching.

Pub. Date : 2002 Feb 10

PMID : 11908218






1 Functional Relationships(s)
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1 BCl3-Ar chemistry was found to give satisfactory results; N2 and Cl2 were added to change the selectivity between GaAs and e-beam resist. Chlorine BCL3 transcription coactivator Homo sapiens